BibTeX record conf/irps/BeckmeierHCR22

download as .bib file

@inproceedings{DBLP:conf/irps/BeckmeierHCR22,
  author       = {Daniel Beckmeier and
                  Jifa Hao and
                  Jake Choi and
                  Matt Ring},
  title        = {Revealing stresses for plasma induced damage detection in thick oxides},
  booktitle    = {{IEEE} International Reliability Physics Symposium, {IRPS} 2022, Dallas,
                  TX, USA, March 27-31, 2022},
  pages        = {1--6},
  publisher    = {{IEEE}},
  year         = {2022},
  url          = {https://doi.org/10.1109/IRPS48227.2022.9764476},
  doi          = {10.1109/IRPS48227.2022.9764476},
  timestamp    = {Mon, 09 May 2022 18:11:25 +0200},
  biburl       = {https://dblp.org/rec/conf/irps/BeckmeierHCR22.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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