BibTeX record conf/imw2/ChuRZAS22

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@inproceedings{DBLP:conf/imw2/ChuRZAS22,
  author       = {Weishen Chu and
                  Seyyed Ehsan Esfahani Rashidi and
                  Yanli Zhang and
                  Johann Alsmeier and
                  Toshiyuki Sega},
  title        = {An Analytical Model for Thin Film Pattern-dependent Asymmetric Wafer
                  Warpage Prediction},
  booktitle    = {{IEEE} International Memory Workshop, {IMW} 2022, Dresden, Germany,
                  May 15-18, 2022},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2022},
  url          = {https://doi.org/10.1109/IMW52921.2022.9779248},
  doi          = {10.1109/IMW52921.2022.9779248},
  timestamp    = {Fri, 16 Jun 2023 10:04:07 +0200},
  biburl       = {https://dblp.org/rec/conf/imw2/ChuRZAS22.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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