BibTeX record conf/imw2/AliOKLLSRSPKCRH22

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@inproceedings{DBLP:conf/imw2/AliOKLLSRSPKCRH22,
  author       = {Tarek Ali and
                  Ricardo Olivo and
                  S. Kerdil{\`{e}}s and
                  David Lehninger and
                  Maximilian Lederer and
                  Sourav De and
                  A.{-}S. Royet and
                  Ayse S{\"{u}}nb{\"{u}}l and
                  A. Prabhu and
                  Kati K{\"{u}}hnel and
                  Malte Czernohorsky and
                  M. Rudolph and
                  Raik Hoffmann and
                  Christelle Charpin{-}Nicolle and
                  Laurent Grenouillet and
                  Thomas K{\"{a}}mpfe and
                  Konrad Seidel},
  title        = {Study of Nanosecond Laser Annealing on Silicon Doped Hafnium Oxide
                  Film Crystallization and Capacitor Reliability},
  booktitle    = {{IEEE} International Memory Workshop, {IMW} 2022, Dresden, Germany,
                  May 15-18, 2022},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2022},
  url          = {https://doi.org/10.1109/IMW52921.2022.9779281},
  doi          = {10.1109/IMW52921.2022.9779281},
  timestamp    = {Tue, 14 May 2024 19:49:45 +0200},
  biburl       = {https://dblp.org/rec/conf/imw2/AliOKLLSRSPKCRH22.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}