Christian Brecher Martin Weinzierl Manufacturing of Devices for the Parallel Precision Alignment of Multiple Micro Components. 297-304 2008 IPAS http://dx.doi.org/10.1007/978-0-387-77405-3_29 conf/ifip5-5/2008ipas db/conf/ifip5-5/ipas2008.html#BrecherW08