BibTeX record conf/ieeesensors/NakamuraHTTLP16

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@inproceedings{DBLP:conf/ieeesensors/NakamuraHTTLP16,
  author       = {Katsuo Nakamura and
                  Yoshikazu Hirai and
                  Toshiyuki Tsuchiya and
                  Osamu Tabata and
                  Florian Larramendy and
                  Oliver Paul},
  title        = {Simulation study of {SU-8} structures realized by single-step projection
                  photolithography},
  booktitle    = {2016 {IEEE} SENSORS, Orlando, FL, USA, October 30 - November 3, 2016},
  pages        = {1--3},
  publisher    = {{IEEE}},
  year         = {2016},
  url          = {https://doi.org/10.1109/ICSENS.2016.7808444},
  doi          = {10.1109/ICSENS.2016.7808444},
  timestamp    = {Sat, 13 May 2023 00:07:14 +0200},
  biburl       = {https://dblp.org/rec/conf/ieeesensors/NakamuraHTTLP16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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