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BibTeX record conf/ieeesensors/NabaviMN22
@inproceedings{DBLP:conf/ieeesensors/NabaviMN22, author = {Seyedfakhreddin Nabavi and Micha{\"{e}}l M{\'{e}}nard and Frederic Nabki}, title = {Vertical Electrostatic {MEMS} Aligner with Integrated Silicon Nitride Optical Waveguides}, booktitle = {2022 {IEEE} Sensors, Dallas, TX, USA, October 30 - Nov. 2, 2022}, pages = {1--4}, publisher = {{IEEE}}, year = {2022}, url = {https://doi.org/10.1109/SENSORS52175.2022.9967301}, doi = {10.1109/SENSORS52175.2022.9967301}, timestamp = {Sat, 30 Sep 2023 09:47:42 +0200}, biburl = {https://dblp.org/rec/conf/ieeesensors/NabaviMN22.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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