BibTeX record conf/ieeesensors/NabaviMN22

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@inproceedings{DBLP:conf/ieeesensors/NabaviMN22,
  author       = {Seyedfakhreddin Nabavi and
                  Micha{\"{e}}l M{\'{e}}nard and
                  Frederic Nabki},
  title        = {Vertical Electrostatic {MEMS} Aligner with Integrated Silicon Nitride
                  Optical Waveguides},
  booktitle    = {2022 {IEEE} Sensors, Dallas, TX, USA, October 30 - Nov. 2, 2022},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2022},
  url          = {https://doi.org/10.1109/SENSORS52175.2022.9967301},
  doi          = {10.1109/SENSORS52175.2022.9967301},
  timestamp    = {Sat, 30 Sep 2023 09:47:42 +0200},
  biburl       = {https://dblp.org/rec/conf/ieeesensors/NabaviMN22.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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