BibTeX record conf/ieeesensors/MeinelSMZFHO19

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@inproceedings{DBLP:conf/ieeesensors/MeinelSMZFHO19,
  author       = {Katja Meinel and
                  Chris Stoeckel and
                  Marcel Melzer and
                  Sven Zimmermann and
                  Roman Forke and
                  Karla Hiller and
                  Thomas Otto},
  title        = {Piezoelectric scanning micromirror with built-in sensors based on
                  thin film aluminum nitride},
  booktitle    = {2019 {IEEE} SENSORS, Montreal, QC, Canada, October 27-30, 2019},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2019},
  url          = {https://doi.org/10.1109/SENSORS43011.2019.8956929},
  doi          = {10.1109/SENSORS43011.2019.8956929},
  timestamp    = {Sun, 12 Feb 2023 18:47:58 +0100},
  biburl       = {https://dblp.org/rec/conf/ieeesensors/MeinelSMZFHO19.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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