BibTeX record conf/ieeesensors/LiuNLZSW23

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@inproceedings{DBLP:conf/ieeesensors/LiuNLZSW23,
  author       = {Xiaojiang Liu and
                  Gaoqiang Niu and
                  Jin Li and
                  Yi Zhuang and
                  Xitong Sun and
                  Fei Wang},
  title        = {{MEMS} Gas Sensors with Metal-Oxide Semiconductor Materials Patterned
                  at Wafer-Level by Photolithography Technique},
  booktitle    = {2023 {IEEE} SENSORS, Vienna, Austria, October 29 - Nov. 1, 2023},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2023},
  url          = {https://doi.org/10.1109/SENSORS56945.2023.10324896},
  doi          = {10.1109/SENSORS56945.2023.10324896},
  timestamp    = {Thu, 14 Dec 2023 11:20:49 +0100},
  biburl       = {https://dblp.org/rec/conf/ieeesensors/LiuNLZSW23.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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