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BibTeX record conf/ieeesensors/KonishiSMYSMT16
@inproceedings{DBLP:conf/ieeesensors/KonishiSMYSMT16, author = {Toshifumi Konishi and Teruaki Safu and Katsuyuki Machida and Daisuke Yamane and Masato Sone and Kazuya Masu and Hiroshi Toshiyoshi}, title = {A damping constant model for proof-mass structure design of {MEMS} inertial sensor by multi-layer metal technology}, booktitle = {2016 {IEEE} SENSORS, Orlando, FL, USA, October 30 - November 3, 2016}, pages = {1--3}, publisher = {{IEEE}}, year = {2016}, url = {https://doi.org/10.1109/ICSENS.2016.7808793}, doi = {10.1109/ICSENS.2016.7808793}, timestamp = {Sun, 12 Feb 2023 18:48:06 +0100}, biburl = {https://dblp.org/rec/conf/ieeesensors/KonishiSMYSMT16.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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