BibTeX record conf/ieeesensors/KonishiSMYSMT16

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@inproceedings{DBLP:conf/ieeesensors/KonishiSMYSMT16,
  author       = {Toshifumi Konishi and
                  Teruaki Safu and
                  Katsuyuki Machida and
                  Daisuke Yamane and
                  Masato Sone and
                  Kazuya Masu and
                  Hiroshi Toshiyoshi},
  title        = {A damping constant model for proof-mass structure design of {MEMS}
                  inertial sensor by multi-layer metal technology},
  booktitle    = {2016 {IEEE} SENSORS, Orlando, FL, USA, October 30 - November 3, 2016},
  pages        = {1--3},
  publisher    = {{IEEE}},
  year         = {2016},
  url          = {https://doi.org/10.1109/ICSENS.2016.7808793},
  doi          = {10.1109/ICSENS.2016.7808793},
  timestamp    = {Sun, 12 Feb 2023 18:48:06 +0100},
  biburl       = {https://dblp.org/rec/conf/ieeesensors/KonishiSMYSMT16.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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