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BibTeX record conf/ieeesensors/KiuchiMYTTYK20
@inproceedings{DBLP:conf/ieeesensors/KiuchiMYTTYK20, author = {Mario Kiuchi and Ryoma Miyake and Shinya Yoshida and Shuji Tanaka and Tsuyoshi Takemoto and Yukitaka Yamaguchi and Kenji Komaki}, title = {Commercial Production of Low-k {PZT} film using Sputtering Method}, booktitle = {2020 {IEEE} Sensors, Rotterdam, The Netherlands, October 25-28, 2020}, pages = {1--4}, publisher = {{IEEE}}, year = {2020}, url = {https://doi.org/10.1109/SENSORS47125.2020.9278888}, doi = {10.1109/SENSORS47125.2020.9278888}, timestamp = {Tue, 13 Dec 2022 10:47:04 +0100}, biburl = {https://dblp.org/rec/conf/ieeesensors/KiuchiMYTTYK20.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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