BibTeX record conf/ieeesensors/KiuchiMYTTYK20

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@inproceedings{DBLP:conf/ieeesensors/KiuchiMYTTYK20,
  author       = {Mario Kiuchi and
                  Ryoma Miyake and
                  Shinya Yoshida and
                  Shuji Tanaka and
                  Tsuyoshi Takemoto and
                  Yukitaka Yamaguchi and
                  Kenji Komaki},
  title        = {Commercial Production of Low-k {PZT} film using Sputtering Method},
  booktitle    = {2020 {IEEE} Sensors, Rotterdam, The Netherlands, October 25-28, 2020},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2020},
  url          = {https://doi.org/10.1109/SENSORS47125.2020.9278888},
  doi          = {10.1109/SENSORS47125.2020.9278888},
  timestamp    = {Tue, 13 Dec 2022 10:47:04 +0100},
  biburl       = {https://dblp.org/rec/conf/ieeesensors/KiuchiMYTTYK20.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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