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BibTeX record conf/ieeesensors/GhanamBGW22
@inproceedings{DBLP:conf/ieeesensors/GhanamBGW22, author = {Muhannad Ghanam and Thomas Bilger and Frank Goldschmidtboeing and Peter Woias}, title = {{MEMS} Self-Packaged Capacitive Absolute Pressure and Force Sensors for High-Temperature Application}, booktitle = {2022 {IEEE} Sensors, Dallas, TX, USA, October 30 - Nov. 2, 2022}, pages = {1--4}, publisher = {{IEEE}}, year = {2022}, url = {https://doi.org/10.1109/SENSORS52175.2022.9967300}, doi = {10.1109/SENSORS52175.2022.9967300}, timestamp = {Sun, 06 Aug 2023 20:52:00 +0200}, biburl = {https://dblp.org/rec/conf/ieeesensors/GhanamBGW22.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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