BibTeX record conf/iecon/YunKYLKKCKN23

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@inproceedings{DBLP:conf/iecon/YunKYLKKCKN23,
  author       = {Hyeonjun Yun and
                  Hyeseon Kwon and
                  Sangsu Yeh and
                  Minsu Lee and
                  Jonghwa Kim and
                  Yunha Kim and
                  Seungwoo Cha and
                  Mingu Kang and
                  Jooyeop Nam},
  title        = {High-Speed Wafer Temperature Control Approach of Step Chiller for
                  Semiconductor Manufacturing Equipment},
  booktitle    = {49th Annual Conference of the {IEEE} Industrial Electronics Society,
                  {IECON} 2023, Singapore, October 16-19, 2023},
  pages        = {1--6},
  publisher    = {{IEEE}},
  year         = {2023},
  url          = {https://doi.org/10.1109/IECON51785.2023.10312511},
  doi          = {10.1109/IECON51785.2023.10312511},
  timestamp    = {Sat, 25 Nov 2023 16:52:31 +0100},
  biburl       = {https://dblp.org/rec/conf/iecon/YunKYLKKCKN23.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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