BibTeX record conf/icta3/LiuYDW23

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@inproceedings{DBLP:conf/icta3/LiuYDW23,
  author       = {Linjie Liu and
                  Xiaohui Yuan and
                  Yu Du and
                  Chenxi Wang},
  title        = {Sufficient Hydroxylation Surface-Activation for Low-Temperature Glass/Glass
                  Direct Bonding},
  booktitle    = {{IEEE} International Conference on Integrated Circuits, Technologies
                  and Applications, {ICTA} 2023, Hefei, China, October 27-29, 2023},
  pages        = {79--80},
  publisher    = {{IEEE}},
  year         = {2023},
  url          = {https://doi.org/10.1109/ICTA60488.2023.10364293},
  doi          = {10.1109/ICTA60488.2023.10364293},
  timestamp    = {Wed, 17 Jan 2024 17:11:29 +0100},
  biburl       = {https://dblp.org/rec/conf/icta3/LiuYDW23.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}