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BibTeX record conf/icsc2/JebriGAOP16
@inproceedings{DBLP:conf/icsc2/JebriGAOP16, author = {Mohamed Ali Jebri and Guillaume Graton and El Mostafa El Adel and Mustapha Ouladsine and Jacques Pinaton}, title = {Virtual metrology on Chemical Mechanical Planarization process based on Just-In-Time Learning}, booktitle = {5th International Conference on Systems and Control, {ICSC} 2016, Marrakesh, Morocco, May 25-27, 2016}, pages = {169--174}, publisher = {{IEEE}}, year = {2016}, url = {https://doi.org/10.1109/ICoSC.2016.7507082}, doi = {10.1109/ICOSC.2016.7507082}, timestamp = {Thu, 17 Nov 2022 21:19:22 +0100}, biburl = {https://dblp.org/rec/conf/icsc2/JebriGAOP16.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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