BibTeX record conf/icra/Ito95

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@inproceedings{DBLP:conf/icra/Ito95,
  author       = {Minoru Ito},
  title        = {An Automated System for {LSI} Fine Pattern Inspection Based on COparison
                  of {SEM} Images and {CAD} Data},
  booktitle    = {Proceedings of the 1995 International Conference on Robotics and Automation,
                  Nagoya, Aichi, Japan, May 21-27, 1995},
  pages        = {544--549},
  publisher    = {{IEEE} Computer Society},
  year         = {1995},
  url          = {https://doi.org/10.1109/ROBOT.1995.525340},
  doi          = {10.1109/ROBOT.1995.525340},
  timestamp    = {Fri, 13 Aug 2021 09:26:01 +0200},
  biburl       = {https://dblp.org/rec/conf/icra/Ito95.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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