BibTeX record conf/icphm/LimD21

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@inproceedings{DBLP:conf/icphm/LimD21,
  author       = {Kart{-}Leong Lim and
                  Rahul Dutta},
  title        = {Prognostics and Health Management of Wafer Chemical-Mechanical Polishing
                  System using Autoencoder},
  booktitle    = {International {IEEE} Conference on Prognostics and Health Management,
                  {ICPHM} 2021, Detroit, MI, USA, June 7-9, 2021},
  pages        = {1--8},
  publisher    = {{IEEE}},
  year         = {2021},
  url          = {https://doi.org/10.1109/ICPHM51084.2021.9486471},
  doi          = {10.1109/ICPHM51084.2021.9486471},
  timestamp    = {Mon, 02 Aug 2021 08:40:32 +0200},
  biburl       = {https://dblp.org/rec/conf/icphm/LimD21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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