Modeling and Schedulability Analysis of Single-Arm Cluster Tools with Wafer Residency Time Constraints Using Petri Net.

Naiqi Wu Chengbin Chu Feng Chu MengChu Zhou Modeling and Schedulability Analysis of Single-Arm Cluster Tools with Wafer Residency Time Constraints Using Petri Net. 84-89 2008 ICNSC http://dx.doi.org/10.1109/ICNSC.2008.4525188 conf/icnsc/2008 db/conf/icnsc/icnsc2008.html#WuCCZ08