BibTeX record conf/icnsc/QiaoLLZWL21

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@inproceedings{DBLP:conf/icnsc/QiaoLLZWL21,
  author       = {Yan Qiao and
                  Jie Li and
                  Yanjun Lu and
                  SiWei Zhang and
                  NaiQi Wu and
                  Bin Liu},
  title        = {A Virtual Wafer-based Scheduling Method for Dual-arm Cluster Tools
                  with Chamber Cleaning Requirements},
  booktitle    = {{IEEE} International Conference on Networking, Sensing and Control,
                  {ICNSC} 2021, Xiamen, China, December 3-5, 2021},
  pages        = {1--6},
  publisher    = {{IEEE}},
  year         = {2021},
  url          = {https://doi.org/10.1109/ICNSC52481.2021.9702173},
  doi          = {10.1109/ICNSC52481.2021.9702173},
  timestamp    = {Mon, 30 Jan 2023 21:01:04 +0100},
  biburl       = {https://dblp.org/rec/conf/icnsc/QiaoLLZWL21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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