BibTeX record conf/icmens/OyaNKTKNH04

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@inproceedings{DBLP:conf/icmens/OyaNKTKNH04,
  author       = {K. Oya and
                  T. Nakazawa and
                  S. Kittaka and
                  K. Tsunetomo and
                  K. Kintaka and
                  Jun Nishii and
                  K. Hirao},
  title        = {Fabrication of One-Dimensional Photonic Crystal with Large Dispersion
                  in SiO2 Glass Substrate Using Deep Dry Etching Technique},
  booktitle    = {2004 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2004), 25-27 August 2004, Banff, Alberta, Canada},
  pages        = {366--368},
  publisher    = {{IEEE} Computer Society},
  year         = {2004},
  url          = {https://doi.org/10.1109/ICMENS.2004.1508977},
  doi          = {10.1109/ICMENS.2004.1508977},
  timestamp    = {Fri, 24 Mar 2023 00:03:40 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/OyaNKTKNH04.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}