BibTeX record conf/icmens/JakewayCVCLG03

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@inproceedings{DBLP:conf/icmens/JakewayCVCLG03,
  author       = {Stephen C. Jakeway and
                  H. John Crabtree and
                  Teodor Veres and
                  Neil S. Cameron and
                  Helge Luesebrink and
                  Thomas Glinsner},
  title        = {Transition of {MEMS} Technology to Nanofabrication},
  booktitle    = {2003 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
                  2003), 20-23 July 2003, Banff, Alberta, Canada},
  pages        = {118--122},
  publisher    = {{IEEE} Computer Society},
  year         = {2003},
  url          = {https://doi.org/10.1109/ICMENS.2003.1221977},
  doi          = {10.1109/ICMENS.2003.1221977},
  timestamp    = {Fri, 24 Mar 2023 00:03:40 +0100},
  biburl       = {https://dblp.org/rec/conf/icmens/JakewayCVCLG03.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}