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BibTeX record conf/icmens/ArshakGCKA05
@inproceedings{DBLP:conf/icmens/ArshakGCKA05, author = {Khalil Arshak and Stephen F. Gilmartin and Damian Collins and Olga Korostynska and Arous Arshak}, title = {Patterning Nanometer Resist Features on Planar and Topography Substrates Using The 2-Step {NERIME} {FIB} Top Surface Imaging Process}, booktitle = {2005 International Conference on MEMS, NANO, and Smart Systems {(ICMENS} 2005), 24-27 July 2005, Banff, Alberta, Canada}, pages = {159--166}, publisher = {{IEEE} Computer Society}, year = {2005}, url = {https://doi.org/10.1109/ICMENS.2005.97}, doi = {10.1109/ICMENS.2005.97}, timestamp = {Fri, 24 Mar 2023 00:03:40 +0100}, biburl = {https://dblp.org/rec/conf/icmens/ArshakGCKA05.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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