BibTeX record conf/icit2/FischerME21

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@inproceedings{DBLP:conf/icit2/FischerME21,
  author       = {Daniel Fischer and
                  Patrick Moder and
                  Hans Ehm},
  title        = {Investigation of Predictive Maintenance for Semiconductor Manufacturing
                  and its Impacts on the Supply Chain},
  booktitle    = {22nd {IEEE} International Conference on Industrial Technology, {ICIT}
                  2021, Valencia, Spain, March 10-12, 2021},
  pages        = {1409--1416},
  publisher    = {{IEEE}},
  year         = {2021},
  url          = {https://doi.org/10.1109/ICIT46573.2021.9453481},
  doi          = {10.1109/ICIT46573.2021.9453481},
  timestamp    = {Sat, 09 Apr 2022 12:37:51 +0200},
  biburl       = {https://dblp.org/rec/conf/icit2/FischerME21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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