BibTeX record conf/iccpr/ZhangJW21

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@inproceedings{DBLP:conf/iccpr/ZhangJW21,
  author       = {Fuzuo Zhang and
                  Wenlan Jiang and
                  Huan{-}gang Wang},
  title        = {Virtual Metrology for Semiconductor Chemical Mechanical Planarization
                  Process Using Wide {\&} Deep Learning},
  booktitle    = {{ICCPR} '21: 10th International Conference on Computing and Pattern
                  Recognition, Shanghai, China, October 15 - 17, 2021},
  pages        = {345--349},
  publisher    = {{ACM}},
  year         = {2021},
  url          = {https://doi.org/10.1145/3497623.3497679},
  doi          = {10.1145/3497623.3497679},
  timestamp    = {Tue, 08 Feb 2022 11:00:36 +0100},
  biburl       = {https://dblp.org/rec/conf/iccpr/ZhangJW21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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