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BibTeX record conf/iccpr/ZhangJW21
@inproceedings{DBLP:conf/iccpr/ZhangJW21, author = {Fuzuo Zhang and Wenlan Jiang and Huan{-}gang Wang}, title = {Virtual Metrology for Semiconductor Chemical Mechanical Planarization Process Using Wide {\&} Deep Learning}, booktitle = {{ICCPR} '21: 10th International Conference on Computing and Pattern Recognition, Shanghai, China, October 15 - 17, 2021}, pages = {345--349}, publisher = {{ACM}}, year = {2021}, url = {https://doi.org/10.1145/3497623.3497679}, doi = {10.1145/3497623.3497679}, timestamp = {Tue, 08 Feb 2022 11:00:36 +0100}, biburl = {https://dblp.org/rec/conf/iccpr/ZhangJW21.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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