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BibTeX record conf/iccma/HermanussenHHV19
@inproceedings{DBLP:conf/iccma/HermanussenHHV19, author = {S. J. Hermanussen and M. B. I. Habets and Marcel Fran{\c{c}}ois Heertjes and J. P. M. B. Vermeulen}, title = {Conformal slip-free wafer chucking using an actuated wafer table}, booktitle = {7th International Conference on Control, Mechatronics and Automation, {ICCMA} 2019, Delft, The Netherlands, November 6-8, 2019}, pages = {278--282}, publisher = {{IEEE}}, year = {2019}, url = {https://doi.org/10.1109/ICCMA46720.2019.8988610}, doi = {10.1109/ICCMA46720.2019.8988610}, timestamp = {Sat, 25 Apr 2020 15:19:23 +0200}, biburl = {https://dblp.org/rec/conf/iccma/HermanussenHHV19.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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