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BibTeX record conf/iccd/OuXCYP17
@inproceedings{DBLP:conf/iccd/OuXCYP17, author = {Jiaojiao Ou and Xiaoqing Xu and Brian Cline and Greg Yeric and David Z. Pan}, title = {{DTCO} for {DSA-MP} Hybrid Lithography with Double-BCP Materials in Sub-7nm Node}, booktitle = {2017 {IEEE} International Conference on Computer Design, {ICCD} 2017, Boston, MA, USA, November 5-8, 2017}, pages = {403--410}, publisher = {{IEEE} Computer Society}, year = {2017}, url = {https://doi.org/10.1109/ICCD.2017.70}, doi = {10.1109/ICCD.2017.70}, timestamp = {Thu, 23 Mar 2023 23:59:54 +0100}, biburl = {https://dblp.org/rec/conf/iccd/OuXCYP17.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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