BibTeX record conf/iccad/MaFRXB05

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@inproceedings{DBLP:conf/iccad/MaFRXB05,
  author       = {James D. Ma and
                  Claire Fang Fang and
                  Rob A. Rutenbar and
                  Xiaolin Xie and
                  Duane S. Boning},
  title        = {Interval-valued statistical modeling of oxide chemical-mechanical
                  polishing},
  booktitle    = {2005 International Conference on Computer-Aided Design, {ICCAD} 2005,
                  San Jose, CA, USA, November 6-10, 2005},
  pages        = {141--148},
  publisher    = {{IEEE} Computer Society},
  year         = {2005},
  url          = {https://doi.org/10.1109/ICCAD.2005.1560054},
  doi          = {10.1109/ICCAD.2005.1560054},
  timestamp    = {Thu, 21 Mar 2024 22:28:52 +0100},
  biburl       = {https://dblp.org/rec/conf/iccad/MaFRXB05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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