<?xml version="1.0"?>
<dblp>
<inproceedings key="conf/iccS/AydtTCLLG08" mdate="2008-06-30">
<author>Heiko Aydt</author>
<author>Stephen John Turner</author>
<author>Wentong Cai</author>
<author>Malcolm Yoke-Hean Low</author>
<author>Peter Lendermann</author>
<author>Boon-Ping Gan</author>
<title>Symbiotic Simulation Control in Semiconductor Manufacturing.</title>
<pages>26-35</pages>
<year>2008</year>
<booktitle>ICCS (3)</booktitle>
<ee>http://dx.doi.org/10.1007/978-3-540-69389-5_5</ee>
<crossref>conf/iccS/2008-3</crossref>
<url>db/conf/iccS/iccS2008-3.html#AydtTCLLG08</url>
</inproceedings>
</dblp>
