BibTeX record conf/icait/KanekoIYKTATNSPT13

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@inproceedings{DBLP:conf/icait/KanekoIYKTATNSPT13,
  author       = {Satoru Kaneko and
                  Takeshi Ito and
                  Manabu Yasui and
                  Masahito Kurouchi and
                  Hironori Torii and
                  Takao Amazawa and
                  Takashi Tikumasu and
                  Takatoshi Nagano and
                  Lee Seughwan and
                  Sungkyun Park and
                  Hirofumi Takikawa},
  title        = {Properties of epitaxial AlN thin film deposited on sapphire substrate
                  by {ECR} plasma},
  booktitle    = {6th {IEEE} International Conference on Advanced Infocomm Technology,
                  {ICAIT} 2013, Hsinchu, Taiwan, July 6-9, 2013},
  pages        = {69--70},
  publisher    = {{IEEE}},
  year         = {2013},
  url          = {https://doi.org/10.1109/ICAIT.2013.6621498},
  doi          = {10.1109/ICAIT.2013.6621498},
  timestamp    = {Wed, 16 Oct 2019 14:14:54 +0200},
  biburl       = {https://dblp.org/rec/conf/icait/KanekoIYKTATNSPT13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}