BibTeX record conf/i2mtc/FuerstBCS20

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@inproceedings{DBLP:conf/i2mtc/FuerstBCS20,
  author       = {Martin E. Fuerst and
                  Nikolaus Berlakovich and
                  Ernst Csencsics and
                  Georg Schitter},
  title        = {Self-Aligning Scanning Shack-Hartmann Sensor for Automatic Wavefront
                  Measurements of High-NA Optics},
  booktitle    = {2020 {IEEE} International Instrumentation and Measurement Technology
                  Conference, {I2MTC} 2020, Dubrovnik, Croatia, May 25-28, 2020},
  pages        = {1--6},
  publisher    = {{IEEE}},
  year         = {2020},
  url          = {https://doi.org/10.1109/I2MTC43012.2020.9128499},
  doi          = {10.1109/I2MTC43012.2020.9128499},
  timestamp    = {Mon, 03 Jan 2022 22:21:47 +0100},
  biburl       = {https://dblp.org/rec/conf/i2mtc/FuerstBCS20.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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