BibTeX record conf/i2mtc/FerlaFR14

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@inproceedings{DBLP:conf/i2mtc/FerlaFR14,
  author       = {Tania Mara Ferla and
                  Guilherme Flach and
                  Ricardo Reis},
  title        = {A tool to simulate optical lithography in nanoCMOs},
  booktitle    = {{IEEE} International Instrumentation and Measurement Technology Conference,
                  {I2MTC} 2014, Proceedings, Montevideo, Uruguay, May 12-15, 2014},
  pages        = {1471--1474},
  publisher    = {{IEEE}},
  year         = {2014},
  url          = {https://doi.org/10.1109/I2MTC.2014.6860989},
  doi          = {10.1109/I2MTC.2014.6860989},
  timestamp    = {Tue, 22 Oct 2019 15:21:14 +0200},
  biburl       = {https://dblp.org/rec/conf/i2mtc/FerlaFR14.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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