BibTeX record conf/ewme/MitaLH18

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@inproceedings{DBLP:conf/ewme/MitaLH18,
  author       = {Yoshio Mita and
                  Eric Lebrasseur and
                  Akio Higo},
  title        = {In-Plane {SOI} {MEMS} as a Mechanical Material for Time and Frequency
                  Studies on Vibration},
  booktitle    = {12th European Workshop on Microelectronics Education, {EWME} 2018,
                  Braunschweig, Germany, September 24-26, 2018},
  pages        = {101--105},
  publisher    = {{IEEE}},
  year         = {2018},
  url          = {https://doi.org/10.1109/EWME.2018.8629393},
  doi          = {10.1109/EWME.2018.8629393},
  timestamp    = {Wed, 16 Oct 2019 14:14:48 +0200},
  biburl       = {https://dblp.org/rec/conf/ewme/MitaLH18.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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