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BibTeX record conf/evoW/FuhnerEFTK04
@inproceedings{DBLP:conf/evoW/FuhnerEFTK04, author = {Tim F{\"{u}}hner and Andreas Erdmann and Rich{\'{a}}rd Farkas and Bernd Tollk{\"{u}}hn and Gabriella K{\'{o}}kai}, editor = {G{\"{u}}nther R. Raidl and Stefano Cagnoni and J{\"{u}}rgen Branke and David Corne and Rolf Drechsler and Yaochu Jin and Colin G. Johnson and Penousal Machado and Elena Marchiori and Franz Rothlauf and George D. Smith and Giovanni Squillero}, title = {Genetic Algorithms to Improve Mask and Illumination Geometries in Lithographic Imaging Systems}, booktitle = {Applications of Evolutionary Computing, EvoWorkshops 2004: EvoBIO, EvoCOMNET, EvoHOT, EvoIASP, EvoMUSART, and EvoSTOC, Coimbra, Portugal, April 5-7, 2004, Proceedings}, series = {Lecture Notes in Computer Science}, volume = {3005}, pages = {208--218}, publisher = {Springer}, year = {2004}, url = {https://doi.org/10.1007/978-3-540-24653-4\_22}, doi = {10.1007/978-3-540-24653-4\_22}, timestamp = {Sun, 02 Oct 2022 16:01:07 +0200}, biburl = {https://dblp.org/rec/conf/evoW/FuhnerEFTK04.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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