BibTeX record conf/essderc/ZurauskaiteOH21

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@inproceedings{DBLP:conf/essderc/ZurauskaiteOH21,
  author       = {Laura Zurauskaite and
                  Mikael {\"{O}}stling and
                  Per{-}Erik Hellstr{\"{o}}m},
  title        = {Improvement on Ge/GeOx/Tm2O3/HfO2 Gate Performance by Forming Gas
                  Anneal},
  booktitle    = {51st {IEEE} European Solid-State Device Research Conference, {ESSDERC}
                  2021, Grenoble, France, September 13-22, 2021},
  pages        = {227--230},
  publisher    = {{IEEE}},
  year         = {2021},
  url          = {https://doi.org/10.1109/ESSDERC53440.2021.9631773},
  doi          = {10.1109/ESSDERC53440.2021.9631773},
  timestamp    = {Sat, 30 Sep 2023 09:40:28 +0200},
  biburl       = {https://dblp.org/rec/conf/essderc/ZurauskaiteOH21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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