BibTeX record conf/essderc/ShiSCCSSSMLH18

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@inproceedings{DBLP:conf/essderc/ShiSCCSSSMLH18,
  author       = {Jinglin Shi and
                  A. Sidelnicov and
                  Kok Wai J. Chew and
                  Mei See Chin and
                  C. Schippel and
                  J. M. M. dos Santos and
                  Frank Schlaphof and
                  Lutz Meinshausen and
                  John R. Long and
                  David L. Harame},
  title        = {Evolution and Optimization of {BEOL} {MOM} Capacitors Across Advanced
                  {CMOS} Nodes},
  booktitle    = {48th European Solid-State Device Research Conference, {ESSDERC} 2018,
                  Dresden, Germany, September 3-6, 2018},
  pages        = {190--193},
  publisher    = {{IEEE}},
  year         = {2018},
  url          = {https://doi.org/10.1109/ESSDERC.2018.8486905},
  doi          = {10.1109/ESSDERC.2018.8486905},
  timestamp    = {Fri, 26 Mar 2021 18:17:53 +0100},
  biburl       = {https://dblp.org/rec/conf/essderc/ShiSCCSSSMLH18.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}