BibTeX record conf/essderc/RebuffatMMOMPLL13

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@inproceedings{DBLP:conf/essderc/RebuffatMMOMPLL13,
  author       = {Benjamin Rebuffat and
                  Vincenzo Della Marca and
                  Pascal Masson and
                  Jean{-}Luc Ogier and
                  Marc Mantelli and
                  Olivier Paulet and
                  Laurent Lopez and
                  Romain Laffont},
  title        = {Effect of ions presence in the SiOCH inter metal dielectric structure},
  booktitle    = {Proceedings of the European Solid-State Device Research Conference,
                  {ESSDERC} 2013, Bucharest, Romania, September 16-20, 2013},
  pages        = {218--221},
  publisher    = {{IEEE}},
  year         = {2013},
  url          = {https://doi.org/10.1109/ESSDERC.2013.6818858},
  doi          = {10.1109/ESSDERC.2013.6818858},
  timestamp    = {Wed, 05 May 2021 08:50:07 +0200},
  biburl       = {https://dblp.org/rec/conf/essderc/RebuffatMMOMPLL13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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