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BibTeX record conf/essderc/MoritaMMMO12
@inproceedings{DBLP:conf/essderc/MoritaMMMO12, author = {Yukinori Morita and Shinji Migita and Wataru Mizubayashi and Meishoku Masahara and Hiroyuki Ota}, title = {Two-step annealing effects on ultrathin {EOT} higher-k (k = 40) ALD-HfO2 gate stacks}, booktitle = {Proceedings of the 2012 European Solid-State Device Research Conference, {ESSDERC} 2012, Bordeaux, France, September 17-21, 2012}, pages = {81--84}, publisher = {{IEEE}}, year = {2012}, url = {https://doi.org/10.1109/ESSDERC.2012.6343338}, doi = {10.1109/ESSDERC.2012.6343338}, timestamp = {Wed, 16 Oct 2019 14:14:50 +0200}, biburl = {https://dblp.org/rec/conf/essderc/MoritaMMMO12.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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