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BibTeX record conf/essderc/LittaHO13
@inproceedings{DBLP:conf/essderc/LittaHO13, author = {Eugenio Dentoni Litta and Per{-}Erik Hellstr{\"{o}}m and Mikael {\"{O}}stling}, title = {Mobility enhancement by integration of TmSiO {IL} in 0.65nm {EOT} high-k/metal gate MOSFETs}, booktitle = {Proceedings of the European Solid-State Device Research Conference, {ESSDERC} 2013, Bucharest, Romania, September 16-20, 2013}, pages = {155--158}, publisher = {{IEEE}}, year = {2013}, url = {https://doi.org/10.1109/ESSDERC.2013.6818842}, doi = {10.1109/ESSDERC.2013.6818842}, timestamp = {Sun, 02 Oct 2022 16:00:38 +0200}, biburl = {https://dblp.org/rec/conf/essderc/LittaHO13.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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