BibTeX record conf/essderc/HudeczekB21

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@inproceedings{DBLP:conf/essderc/HudeczekB21,
  author       = {Richard Hudeczek and
                  Peter Baumgartner},
  title        = {Mechanical Band Gap Formation in Anisotropic {CMOS} Back-End-of-Line
                  Stacks for Monolithic High-Q {MEMS} Resonator Confinement},
  booktitle    = {51st {IEEE} European Solid-State Device Research Conference, {ESSDERC}
                  2021, Grenoble, France, September 13-22, 2021},
  pages        = {211--214},
  publisher    = {{IEEE}},
  year         = {2021},
  url          = {https://doi.org/10.1109/ESSDERC53440.2021.9631769},
  doi          = {10.1109/ESSDERC53440.2021.9631769},
  timestamp    = {Fri, 24 Dec 2021 12:03:01 +0100},
  biburl       = {https://dblp.org/rec/conf/essderc/HudeczekB21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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