BibTeX record conf/essderc/HerdianIHSSO21

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@inproceedings{DBLP:conf/essderc/HerdianIHSSO21,
  author       = {Hans Herdian and
                  Takeshi Inoue and
                  Takuichi Hirano and
                  Masatsugu Sogabe and
                  Atsushi Shirane and
                  Kenichi Okada},
  title        = {Dual-Layer Proton Irradiation for Creating Thermally-Stable High-Resistivity
                  Region in Si {CMOS} Substrate},
  booktitle    = {51st {IEEE} European Solid-State Device Research Conference, {ESSDERC}
                  2021, Grenoble, France, September 13-22, 2021},
  pages        = {191--194},
  publisher    = {{IEEE}},
  year         = {2021},
  url          = {https://doi.org/10.1109/ESSDERC53440.2021.9631800},
  doi          = {10.1109/ESSDERC53440.2021.9631800},
  timestamp    = {Sun, 02 Oct 2022 16:00:38 +0200},
  biburl       = {https://dblp.org/rec/conf/essderc/HerdianIHSSO21.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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