BibTeX record conf/essderc/GhidiniMCPMGZTG15

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@inproceedings{DBLP:conf/essderc/GhidiniMCPMGZTG15,
  author       = {Gabriella Ghidini and
                  Daniele Merlini and
                  Massimiliano Cannavo and
                  Maria Luisa Polignano and
                  Isabella Mica and
                  Amos Galbiati and
                  Lucia Zullino and
                  Riccardo Turconi and
                  Salvatore Grasso and
                  Maurizio Moroni and
                  Davide Codegoni},
  title        = {{H2} annealing for metallic contaminant reduction in {BCD-SOI} process:
                  Benefits and drawbacks},
  booktitle    = {45th European Solid State Device Research Conference, {ESSDERC} 2015,
                  Graz, Austria, September 14-18, 2015},
  pages        = {294--297},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/ESSDERC.2015.7324772},
  doi          = {10.1109/ESSDERC.2015.7324772},
  timestamp    = {Sat, 19 Oct 2019 20:10:45 +0200},
  biburl       = {https://dblp.org/rec/conf/essderc/GhidiniMCPMGZTG15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}