BibTeX record conf/essderc/FlorentLPPPRGH17

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@inproceedings{DBLP:conf/essderc/FlorentLPPPRGH17,
  author       = {Karine Florent and
                  Simone Lavizzari and
                  Luca Di Piazza and
                  Mihaela Popovici and
                  Goedele Potoms and
                  Tom Raymaekers and
                  Guido Groeseneken and
                  Jan Van Houdt},
  title        = {From planar to vertical capacitors: {A} step towards ferroelectric
                  V-FeFET integration},
  booktitle    = {47th European Solid-State Device Research Conference, {ESSDERC} 2017,
                  Leuven, Belgium, September 11-14, 2017},
  pages        = {164--167},
  publisher    = {{IEEE}},
  year         = {2017},
  url          = {https://doi.org/10.1109/ESSDERC.2017.8066617},
  doi          = {10.1109/ESSDERC.2017.8066617},
  timestamp    = {Sat, 19 Oct 2019 20:10:44 +0200},
  biburl       = {https://dblp.org/rec/conf/essderc/FlorentLPPPRGH17.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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