BibTeX record conf/essderc/DubreuilBPHBSGSLMCAMSA23

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@inproceedings{DBLP:conf/essderc/DubreuilBPHBSGSLMCAMSA23,
  author       = {T. Dubreuil and
                  S. Barraud and
                  J.{-}M. Pedini and
                  J.{-}M. Hartmann and
                  F. Boulard and
                  A. Sarrazin and
                  A. Gharbi and
                  Johannes Sturm and
                  A. Lambert and
                  S. Martin and
                  Niccolo Castellani and
                  A. Anotta and
                  A. Magalhaes{-}Lucas and
                  Aurelie Souhaite and
                  Fran{\c{c}}ois Andrieu},
  title        = {Integration of HfO2-based 3D OxRAM with {GAA} stacked-nanosheet transistor
                  for high-density embedded memory},
  booktitle    = {53rd {IEEE} European Solid-State Device Research Conference, {ESSDERC}
                  2023, Lisbon, Portugal, September 11-14, 2023},
  pages        = {117--120},
  publisher    = {{IEEE}},
  year         = {2023},
  url          = {https://doi.org/10.1109/ESSDERC59256.2023.10268513},
  doi          = {10.1109/ESSDERC59256.2023.10268513},
  timestamp    = {Wed, 18 Oct 2023 09:14:06 +0200},
  biburl       = {https://dblp.org/rec/conf/essderc/DubreuilBPHBSGSLMCAMSA23.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}