BibTeX record conf/essderc/DeheWFK13

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@inproceedings{DBLP:conf/essderc/DeheWFK13,
  author       = {Alfons Dehe and
                  Martin Wurzer and
                  Marc Fuldner and
                  Ulrich Krumbein},
  title        = {Design of a poly silicon {MEMS} microphone for high signal-to-noise
                  ratio},
  booktitle    = {Proceedings of the European Solid-State Device Research Conference,
                  {ESSDERC} 2013, Bucharest, Romania, September 16-20, 2013},
  pages        = {292--295},
  publisher    = {{IEEE}},
  year         = {2013},
  url          = {https://doi.org/10.1109/ESSDERC.2013.6818876},
  doi          = {10.1109/ESSDERC.2013.6818876},
  timestamp    = {Wed, 16 Oct 2019 14:14:50 +0200},
  biburl       = {https://dblp.org/rec/conf/essderc/DeheWFK13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}