BibTeX record conf/essderc/CiappaIIFS14

download as .bib file

@inproceedings{DBLP:conf/essderc/CiappaIIFS14,
  author       = {Mauro Ciappa and
                  Emre Ilg{\"{u}}nsatiroglu and
                  Alexey Yu. Illarionov and
                  F. Filosomi and
                  C. Santini},
  title        = {Monte Carlo modeling of the extraction of roughness parameters at
                  nanometer scale by Critical Dimension Scanning Electron Microscopy},
  booktitle    = {44th European Solid State Device Research Conference, {ESSDERC} 2014,
                  Venice Lido, Italy, September 22-26, 2014},
  pages        = {357--360},
  publisher    = {{IEEE}},
  year         = {2014},
  url          = {https://doi.org/10.1109/ESSDERC.2014.6948834},
  doi          = {10.1109/ESSDERC.2014.6948834},
  timestamp    = {Wed, 16 Oct 2019 14:14:50 +0200},
  biburl       = {https://dblp.org/rec/conf/essderc/CiappaIIFS14.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
a service of  Schloss Dagstuhl - Leibniz Center for Informatics

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.