BibTeX record conf/drc/IslamMDLGSWSDTL22

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@inproceedings{DBLP:conf/drc/IslamMDLGSWSDTL22,
  author       = {Ahmad Islam and
                  Adam Miesle and
                  M. Dietz and
                  Kevin D. Leedy and
                  S. Ganguli and
                  G. Subramanyam and
                  Weisong Wang and
                  Nicholas Sepelak and
                  Daniel Dryden and
                  Stephen E. Tetlak and
                  Kyle J. Liddy and
                  Andrew J. Green and
                  Kelson D. Chabak},
  title        = {Thermal stability of ALD-grown SiO2 and Al2O3 on {(010)} {\(\beta\)}-Ga2O3
                  substrates},
  booktitle    = {Device Research Conference, {DRC} 2022, Columbus, OH, USA, June 26-29,
                  2022},
  pages        = {1--2},
  publisher    = {{IEEE}},
  year         = {2022},
  url          = {https://doi.org/10.1109/DRC55272.2022.9855795},
  doi          = {10.1109/DRC55272.2022.9855795},
  timestamp    = {Tue, 08 Aug 2023 12:06:53 +0200},
  biburl       = {https://dblp.org/rec/conf/drc/IslamMDLGSWSDTL22.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}