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BibTeX record conf/drc/IslamMDLGSWSDTL22
@inproceedings{DBLP:conf/drc/IslamMDLGSWSDTL22, author = {Ahmad Islam and Adam Miesle and M. Dietz and Kevin D. Leedy and S. Ganguli and G. Subramanyam and Weisong Wang and Nicholas Sepelak and Daniel Dryden and Stephen E. Tetlak and Kyle J. Liddy and Andrew J. Green and Kelson D. Chabak}, title = {Thermal stability of ALD-grown SiO2 and Al2O3 on {(010)} {\(\beta\)}-Ga2O3 substrates}, booktitle = {Device Research Conference, {DRC} 2022, Columbus, OH, USA, June 26-29, 2022}, pages = {1--2}, publisher = {{IEEE}}, year = {2022}, url = {https://doi.org/10.1109/DRC55272.2022.9855795}, doi = {10.1109/DRC55272.2022.9855795}, timestamp = {Tue, 08 Aug 2023 12:06:53 +0200}, biburl = {https://dblp.org/rec/conf/drc/IslamMDLGSWSDTL22.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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