Extraction of defect density and size distributions from wafer sort test results.

Jeffrey E. Nelson Thomas Zanon Rao Desineni Jason G. Brown N. Patil Wojciech Maly R. D. (Shawn) Blanton Extraction of defect density and size distributions from wafer sort test results. 913-918 2006 conf/date/2006p DATE http://doi.acm.org/10.1145/1131737 db/conf/date/date2006p.html#NelsonZDBPMB06