Michael Lifshits Roman Goldenberg Ehud Rivlin Michael Rudzsky Using Pattern Recognition for Self-Localization in Semiconductor Manufacturing Systems. 520-527 http://springerlink.metapress.com/openurl.asp?genre=article&issn=0302-9743&volume=3175&spage=520 2004 conf/dagm/2004 DAGM-Symposium db/conf/dagm/dagm2004.html#LifshitsGRR04