A cost-driven lithographic correction methodology based on off-the-shelf sizing tools.

Puneet Gupta Andrew B. Kahng Dennis Sylvester Jie Yang A cost-driven lithographic correction methodology based on off-the-shelf sizing tools. 16-21 2003 conf/dac/2003 DAC http://doi.acm.org/10.1145/775832.775840 db/conf/dac/dac2003.html#GuptaKSY03