Hao Zhang Yuanqiang Tan Mingjun Li A Numerical Simulation of Motion of Particles under the Wafer in CMP. 31-34 2008 CSSE (3) http://dx.doi.org/10.1109/CSSE.2008.463 conf/csse/2008-3 db/conf/csse/csse2008-3.html#ZhangTL08