BibTeX record conf/csit/ProkhorovPFK20

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@inproceedings{DBLP:conf/csit/ProkhorovPFK20,
  author       = {Oleksandr V. Prokhorov and
                  Yurii Pronchakov and
                  Oleg Fedorovich and
                  Nataliia Kunanets},
  title        = {Modeling of Technological Process in Nanoelectronic Production},
  booktitle    = {{IEEE} 15th International Conference on Computer Sciences and Information
                  Technologies, {CSIT} 2020, Zbarazh, Ukraine, September 23-26, 2020
                  - Volume 1},
  pages        = {324--327},
  publisher    = {{IEEE}},
  year         = {2020},
  url          = {https://doi.org/10.1109/CSIT49958.2020.9321926},
  doi          = {10.1109/CSIT49958.2020.9321926},
  timestamp    = {Thu, 29 Sep 2022 08:35:53 +0200},
  biburl       = {https://dblp.org/rec/conf/csit/ProkhorovPFK20.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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